DIAGNOSIS MODEL INVESTIGATION OF SEMICONDUCTOR SMART PRESSURE SENSORS

Volkov Vadim Sergeevich, candidate of technical sciences, senior stuff scientist, Research Institute of Physical Measurements, distorsion@rambler.ru
Barinov Il'ya Nikolaevich, candidate of technical sciences, head of department, Research Institute of Physical Measurements, mzungu@inbox.ru
Tsypin Boris Vul'fovich, doctor of technical sciences, professor, sub-department of information and measuring technique, Penza State University, cypin@yandex.ru

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The article describes using circuit simulation program for developing the diagnosis models of semiconductor smart pressure sensors and its units.

circuit simulation, diagnosis model, semiconductor smart pressure sensor.